sem-eds-analyzer

SEM-EDS Analyzer

Purpose

The SEM-EDS Analyzer skill provides comprehensive scanning electron microscopy and energy dispersive X-ray spectroscopy analysis for nanomaterial morphology and elemental composition characterization.

Capabilities

• Automated SEM image analysis
• EDS spectrum acquisition and quantification
• Elemental mapping and line scans
• Particle size from SEM images
• Surface morphology characterization
• Cross-section analysis

Usage Guidelines

SEM-EDS Analysis

1. Image Acquisition
2. Optimize accelerating voltage for sample
3. Select appropriate detector (SE, BSE)
4. Minimize charging artifacts

1. EDS Analysis
2. Acquire spectra at appropriate kV
3. Apply ZAF corrections
4. Generate elemental maps

1. Quantification
2. Use standardless or standards-based
3. Report detection limits
4. Account for matrix effects

Process Integration

• Multi-Modal Nanomaterial Characterization Pipeline
• Nanodevice Integration Process Flow
• Nanolithography Process Development

Input Schema

{
  "sample_id": "string",
  "analysis_type": "imaging|eds_point|eds_map|line_scan",
  "accelerating_voltage": "number (kV)",
  "elements_of_interest": ["string"]
}

Output Schema

{
  "morphology": {
    "features": ["string"],
    "measurements": [{"feature": "string", "value": "number", "unit": "string"}]
  },
  "composition": [{
    "element": "string",
    "weight_percent": "number",
    "atomic_percent": "number"
  }],
  "elemental_maps": [{
    "element": "string",
    "image_path": "string"
  }]
}